Semiconductor process equipment

The ion implantation technique is used in the semi-conductor industry to locally modify the composition and physical properties of a substrate, especially when doping agents such as boron, phosphorus and arsenic introduced… The electrodes and graphite protective screens on these machines are subjected to significant erosion caused by ion bombardment.

• Mersen's fine grain and high-density ultra-pure graphite resists erosion very well.
• Mersen has also developed a Vitreous Carbon Impregnation "VCI", to further enhance the strength of these parts, while reducing particle emissions.

Mersen proposes equipment made of ultra-pure graphite coated with silicon carbide.
These dedicated solutions are the fruit of our expertise in materials and precision machining:

• Ultra-pure graphite grades checked by ETV-ICP.
• The compatibility (CTE) of our graphite grades with silicon carbide guarantees long term integrity of the protective coating.
• Our precision machining process undergoes three-dimensional examination to ensure that the design of highly complex parts is respected.