SiC for semiconductor and optomechanical equipment
Mersen Boostec provides the silicon carbide ultra-stable structures that are now required by the semiconductor and opto-mechanical equipment.
Semiconductor and opto-mechanics OEMs
BOOSTEC® SiC Solutions are used where ultra-precision is required, in:
- Semiconductor industry processes,
- EUV lithography machines,
- Advanced measuring instruments for optical surfaces,
- Ultra-high vacuum,
- Scientific equipment.
Boostec® SiC solution
- Open Boostec® SiC Solution configuration options
- High mechanical strength and absence of mechanical fatigue,
- Perfect isotropy of the SiC material,
- Flawless polishable finish which can be used as optical reference,
- Perfect stability over time,
- Water and gas tight, no outgassing, no moisture absorption,
- Wear resistance,
- Excellent chemical inertia,
Boostec expertise in manufacturing & design
- Unique experience in manufacturing 3-meter class ultra-stable structures
- Possibility of integrated solution on a single part: air bearing system, cooling with internal channels, mirror
- From monolithic SiC parts to possibly complex assemblies, Mersen Boostec manufactures highly stable benches, baseplates, beams, sliding structures for fast and accurate positioning, chucks
Contact USA
Sales & Engineering
MI 48838 Greenville
+1 616-754 56 71
Sales & Engineering
PA 15857-1488 St Marys
+1 814 781 1234
Sales & Engineering
MI 48708 Bay City
+1 989-894 29 11
Sales & Engeeniring
65460 BAZET
France
+33 (0)56 233 4500
Contact USA
Sales & Engineering
MI 48838 Greenville
+1 616-754 56 71
Sales & Engineering
PA 15857-1488 St Marys
+1 814 781 1234
Sales & Engineering
MI 48708 Bay City
+1 989-894 29 11
Sales & Engeeniring
65460 BAZET
France
+33 (0)56 233 4500