1. Home .
  2. Products .
  3. Graphite Specialties .
  4. SiC - Silicon Carbide Products .
  5. SiC for semiconductor and optomechanical equipment

Back

SiC for semiconductor and optomechanical equipment

opto-mechanics mersen boostec

Mersen Boostec provides the silicon carbide ultra-stable structures that are now required by the semiconductor and opto-mechanical equipment.

Semiconductor and opto-mechanics OEMs

BOOSTEC® SiC Solutions are used where ultra-precision is required, in:

  • Semiconductor industry processes,
  • EUV lithography machines,
  • Advanced measuring instruments for optical surfaces,
  • Ultra-high vacuum,
  • Scientific equipment.

Boostec® SiC solution

  • Open Boostec® SiC Solution configuration options
  • High mechanical strength and absence of mechanical fatigue,
  • Perfect isotropy of the SiC material,
  • Flawless polishable finish which can be used as optical reference,
  • Perfect stability over time,
  • Water and gas tight, no outgassing, no moisture absorption,
  • Wear resistance,
  • Excellent chemical inertia,

Boostec expertise in manufacturing & design

  • Unique experience in manufacturing 3-meter class ultra-stable structures
  • Possibility of integrated solution on a single part: air bearing system, cooling with internal channels, mirror
  • From monolithic SiC parts to possibly complex assemblies, Mersen Boostec manufactures highly stable benches, baseplates, beams, sliding structures for fast and accurate positioning, chucks

Contact USA

Contact USA

Product Literature

Boostec® SiC Silicon Carbide Material

Download

6.83 MB

Boostec® SiC Silicon Carbide Material

Boostec® SiC Silicon Carbide Material

Download

6.83 MB

Boostec® SiC Silicon Carbide Material

Markets

Electronics

Markets

Electronics